John G. Webster (Editor) 's 35.Microelectromechanical Systems PDF

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6: pp. 775–783, 2002. 34. Fluid Mechanics, L. Landau, E. Liftshitz, Pergammon Press, 1959. 35. W. Newell, Miniaturisation of tuning forks, Science, Vol. 161: pp. 1320–1326, 1968. 36. A. P. Wenger, Vibrating fluid densimeters: a solution to the viscosity problem, IEEE Trans on Industrial Electronics and Control Instrumentation, IECI-27 (3): pp. 247–253, 1980. 37. M. Christen, Air and gas damping of quartz tuning forks, Sensors and Actuators A, 4: pp. 555–564, 1983. 38. R. Johnson and A. Barr, Acoustic and internal damping in uniform beams, J.

SPIE Vol. 4559: pp. 103–111, 2001. 13 48. K. E. Wojciechowski, B. E. Boser and A. P. Pisano, A MEMS resonant strain sensor, Proc. Seventeenth IEEE Annual International Conference on Micro Electro Mechanical Systems, Maastrict, Netherlands: pp. 841–845, 25-29th January 2004. 49. V. Ferrari, A. Ghisla, D. Marioloi and A. Taroni, Silicon resonant accelerometer with electronic compensation of inputoutput cross-talk, Sensors and Actuators A Vol. 123-124: pp. 258–266, 2005. 50. -C. Nguyen and Roger T.

13–16, June 4–7, 1990. 31. Modification of the double ended tuning fork geometry for reduced coupling to its surroundings: finite element analysis and experiments, L. Clayton, S. Swanson, E. , UFFC-34, pp. 243–252, 1987. 32. Z. Hao, A. Erbil, F. Ayazi, An analytical model for support loss in micromachined beam resonators, Sensors and Actuators A, Vol. 109: pp. 156–164, 2003. 33. J. Yang, T. Ono, M. Esashi, Energy dissipation in submicrometer thick single crystal silicon cantilevers, J. Micromech.

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